Precision Flexibility

Handles Multiple Wafer Sizes

The AL120 series consists of three models based on wafer diameter, 200 mm exclusive type (AL120-L8), 150 mm and 200 mm convertible type (AL120-L86) and the 150 mm type for sizes of 150 mm or less (AL120-L6). Each model is designed for wafer transfer and microscope inspection. Topside and backside macro inspections are also available for all wafer sizes

Wafer Transfer of Ultra-thin Wafers Down to 90 m

To meet the challenging demands of thinner wafers, Olympus specially designed transfer arms to now allow an entire cassette of twenty-five 200 mm wafers with thicknesses down to 90 µm to be safely transferred and inspected. A maximum of ten wafer thicknesses can be preset via a control panel.

Precision Capability

Enhanced Macro Inspection Functionality

Macro inspection (LMB) now features a 360-degree self-rotating function for a complete macro inspection of the wafer. This allows for easy identification of defects and particles on the wafer surface for both the top and backside surfaces. In addition, top macro inspection includes up to 30 degrees of tilt using the integrated joystick.

LCD Display Improves Accuracy and Convenience

An LCD display provides the operator with the ability to visually configure inspection recipes and sequences, as well as confirm set-up conditions. Inspection results, including operator input of micro and macro defects, are displayed on the LCD for operator review

Precision Flexibility

Wafer Safety Functions

The AL120 employs two new wafer detection functions: wafer height and cross-slot placement. Wafers are scanned prior to wafer transfer to detect the position of the wafers in the cassette, as well as checking for cross-slotted wafers. An optional stage lock kit is available to ensure proper wafer transfer to the vacuum stage

Robust and Reliable Microscope Platform

The Olympus MX61 semiconductor inspection microscope provides exceptional image resolution and clarity through observation methods such as brightfield, darkfield, differential interference contrast (DIC), IR and DUV. The motorized objective turret and aperture stop are interlocked allowing optimal illumination and contrast for each objective lens.

SEMI S2/S8 and RoHS Compliant

AL120's design not only ensures the safety of the wafers and its operators by adhering to SEMI S2 and S8 standards, but it is also RoHS compatible.