With attention to wafer sfety, the AL120 series is committed to enhancing the essence of operations in back-end process and providing improving yield and productivity improvement.

Easy operation

·The AL120-12 series emphasizes usability through features including fully customizable Inspection mode and device design that takes into account operability tailored for exclusive use in back-end process.
· The AL120 also provides you the system with FOSB for exclusive use.

The highest system reliability and inherited system performance

·The AL120-12 series allows safety and automated micro inspection of 300 mm wafers, with keeping the high level of reliability and safety provided in the AL110 series.
·The AL120 enables a transfer of both warped wafer and thin wafer with OLYMPUS safety andreliable handling system.
· The AL120 provides you easy operation and high visibility with the optimized position for macro inspection and the friendly control panel.

Dedicated macro illumination unit (optional)

·Users can select the macro illumination to provide optimal illumination to inspect for particles, scratches, film undulations and defocus.
·The combination of a high-intensity metal halide light source and fiber optics allows illumination of a full-surface of 300 mm wafer with cold-light illumination.