Meeting the Needs of the Electronics Industry

Functional

Designed to meet the ergonomic and safety requirements of the electronics industry with added functionality to enhance analysis capabilities.

User-Friendly

Simplified microscope settings makes it easier for users to make adjustments and reproduce system settings.

Advanced Imaging Technology

Our proven optics and exceptional imaging technology deliver clear images and reliable inspections.

Modular

Users can customize their system with the components that suit their application.

Advanced Analysis Tools

The MX63 series’ various observation capabilities provide clear, sharp images so users can reliably detect defects in their samples. New illumination techniques and image acquisition options within OLYMPUS Stream image analysis software give users more choices for evaluating their samples and documenting their findings.

The Invisible Becomes Visible: MIX Observation and acquisition

MIX observation technology produces unique observation images by combining darkfi eld with another observation method, such as brightfi eld, fl uorescence, or polarization. MIX observation enables users to view defects that are diffi cult to see with conventional microscopes. The circular LED illuminator used for darkfi eld observation has a directional darkfi eld function where only one quadrant is illuminated at a given time. This reduces a sample’s halation and is useful for visualizing a sample’s surface texture.

Easily Create Panoramic Images: Instant MIA

With multiple image alignment (MIA), users can stitch images together quickly and easily simply by moving the KY knobs on the manual stage—a motorized stage is not necessary. OLYMPUS Stream software uses pattern recognition to generate a panoramic image, giving users a wider fi eld of view.

Create All-in-Focus Images: EFI

OLYMPUS Stream software’s extended focus imaging (EFI) function captures images of samples whose height extends beyond the depth of focus. EFI stacks these images together to create a single all-in-focus image of the sample. EFI works with either a manual or motorized Z-axis and creates a height map to easily visualize structures. EFI images can be constructed offl ine within OLYMPUS Stream desktop software.

Capture Both Bright and Dark Areas Using HDR

Using advanced image processing, high dynamic range (HDR) adjusts for differences in brightness within an image to reduce glare. HDR improves the visual quality of digital images thereby helping to generate professional-looking reports.

From Basic Measurement to Advanced Analysis

Measurement is essential to quality and process control and inspection. With this in mind, even the entry-level OLYMPUS Stream software package includes a full menu of interactive measurement functions, with all measurement results saved with image fi les for further documentation. In addition, the OLYMPUS Stream Materials Solution offers an intuitive, workfl ow-oriented interface for complex image analysis. At the click of a button, image analysis tasks can be executed quickly and precisely. With a considerable reduction in processing time for repeated tasks, operators can concentrate on the inspection at hand.

Effi cient Report Creation

Creating a report can often take longer than capturing the image and taking the measurements. OLYMPUS Stream software provides intuitive report creation to repeatedly produce smart and sophisticated reports based on pre-defi ned templates. Editing is simple and reports can be exported to Microsoft Word or PowerPoint software. In addition, OLYMPUS Stream software’s reporting function enables digital zooming and magnifi cation on acquired images. Report fi les are a reasonable size for easier data exchange by email.

Stand-Alone Camera Option

Using a DP22 or DP27 microscope camera, the MX63 series becomes an advanced stand-alone system. The cameras can be controlled via a compact box that requires less space, helping users maximize their laboratory space while still capturing clear images and making basic measurements.

Advanced Designed to Support Cleanroom Conformity

The MX63 series is designed to work in a cleanroom and has features that help minimize the risk of contaminating or damaging samples. The system has an ergonomic design that helps keep users comfortable, even during prolonged use. The MX63 series conforms to international specifications and standards, including SEMI S2/S8, CE, and UL.

Optional Wafer Loader Integration — AL120 System*

An optional wafer loader can be attached to MX63 series to safely transfer both silicon and compound semiconductor wafers from a cassette to the microscope stage without using tweezers or wands. Renowned performance and reliability enable safe, effi cient front and back macro inspections while the loader helps improve productivity in the laboratory.
* The AL120 system is not available in Europe. The AL120 system is designed for use in industrial environments for the EMC performance. Using it in a residential environment may affect other equipment in the environment.

Fast, Clean Inspections

The MX63 series delivers contamination-free wafer inspections. All motorized components are housed in a shielded structure, and antistatic processing is applied to the microscope frame, tubes, breath shield, and other parts.
The rotation speed of the motorized nosepieces is faster and safer than manual nosepieces, decreasing the time between inspections while keeping the operator's hands below the wafer, reducing potential contamination.

System Design Achieving Effi cient Observations

The XY stage is capable of both coarse and fi ne stage movements thanks to the combination of a built-in clutch and the XY knobs. The stage helps make observations effi cient, even for large samples, such as 300 mm wafers. The tilting observation tube’s extensive range enables operators to sit at the microscope in a comfortable posture.

Accepts All Wafer Sizes

The system works with various types of 150–200 mm and 200– 300 mm wafer holders and glass plates. Should the size of the wafters change on the production line, the microscope’s frame can be modifi ed with small budget. With the MX63 series, different stages can be used to accommodate 75 mm, 100 mm, 125 mm, and 150 mm wafers on the inspection line.

Intuitive Microscope Controls: Comfortable and Easy to Use

The microscope’s settings are simple to operate, making it easier for users to make adjustments and reproduce system settings.

Find the Focus Quickly: Focus Aid

Inserting a focus aid in the optical path enables easy and correct focusing on low-contrast samples, such as bare wafers. Focusing on the grid in the focal plane makes it simple to bring your sample into focus.

Ergonomic Controls for Quicker, More Comfortable Operation

The controls for changing the objective and adjusting the aperture stop are positioned low and in the front of the microscope so users don’t have to let go of the focusing knobs or move their head away from the eyepieces during use.

Faster Observations via the Light Intensity Manager and Automatic Aperture Control

In normal microscopes, users need to adjust the light intensity and aperture for every observation. The MX63 series enables users to set up the light intensity and aperture conditions for different magnifi cations and observation methods. These settings can be easily recalled, helping users save time and maintain exceptional image quality.

Exquisite optics and digital imaging for quality inspections

Olympus history of developing high-quality optics and advanced digital imaging capability have resulted in a record of proven optical quality and microscopes that offer good measurement accuracy.

Exceptional Optical Performance: Wave Front Aberration Control

The optical performance of objective lenses directly impacts the quality of the observation images and analysis results. Olympus UIS2 high-magnifi cation objectives are designed to minimize wavefront aberrations, delivering reliable optical performance.

Precise Measurements: Auto Calibration

Similar to digital microscopes, automatic calibration is available when using OLYMPUS Stream software. Auto calibration helps eliminate human variability in the calibration process, leading to more reliable measurements. Auto calibration uses an algorithm that automatically calculates the correct calibration from an average of multiple measurement points. This minimizes variance introduced by different operators and maintains consistent accuracy, improving reliability for regular verifi cation.

Consistent Color Temperature: High-Intensity White LED Illumination

The MX63 series utilizes a high-intensity white LED light source for refl ected and transmitted illumination. The LED maintains a consistent color temperature regardless of intensity for reliable image quality and color reproduction. The LED system provides effi cient, long-life illumination that is ideal for materials science applications.

Entirely Clear Image: Image Shading Correction

OLYMPUS Stream software features shading correction to accommodate for shading around the corners of an image. When used with intensity threshold settings, shading correction provides a more precise analysis.

Applications

Refl ected light microscopy spans a range of applications and industries. These are just a selection of examples of what can be achieved using different observation methods.

Fully Customizable

The MX63 series is designed to enable the customer to choose a variety of optical components to suit individual inspections and application needs. The system can utilize all observation methods. Users can also select from a variety of OLYMPUS Stream image analysis packages to suit individual image acquisition and analysis needs.

Two Systems Accommodate Diverse Sample Sizes

The MX63 system can accommodate wafers up to 200 mm while the MX63L system can handle wafers up to 300 mm with the same small footprint as the MX63 system. The modular design of the MX63 series makes it easy to customize the microscope for your specifi c requirements.

IR Compatibility

Infrared observation can be conducted with the IR objective lenses, which enable the operators to nondestructively inspect the inside of IC chips packed and mounted on a PCB, utilizing the characteristics of silicon that transmit infrared light. 5X to 100X IR objectives are available with chromatic aberration correction from visible light wavelengths through the near infrared.

Build Your System Your Way