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주사전자현미경(SEM) - JEOL
JSM-7001F Scanning Electron Microscope

The JSM-7001F, Thermal Field Emission SEM, is the ideal platform for demanding analytical applications as well as those requiring high resolution and ease-of-use. The JSM-7001F has a large, 5-axis, fully eucentric, motorized, automated specimen stage, a one-action specimen exchange airlock, small probe diameter even at large probe current and low voltage, and expandability with ideal geometry for EDS, WDS, EBSP, and CL. The specimen chamber handles specimens up to 200mm in diameter.

A new Windows® XP based computer interface allows for unprecedented ease of operation including function buttons that switch operation modes quickly and easily. Up to four live images can be simultaneously viewed, including signal mixing, and a single scan can record and store all four images at once.

The JSM-7001F SEM also supports full integration of EDS, WDS, e-beam lithography, and an image database. Stage automation is standard with a 5-axis computer control of X, Y, Z Tilt and eucentric rotation.

Low Vacuum Operation

The JSM-7001FLV offers all the high resolution performance of a field emission SEM with the ability to image non conductive samples at moderate to high kV and higher beam current. EDS, backscatter imaging, EBSD and other analytical techniques can be performed without the need to coat the sample with metal or carbon for conductivity. This is especially useful for applications where: the sample can not be altered, further testing is to be done, or the sample is to be placed back into the production line.


LV Mode Specifications

Specimen chamber pressure: Up to 50 Pa
Resolution: 3.0nm at 30kV (BEI)
Gun chamber pressure: 5 x 10-7 Pa or less
Gas used: Dry nitrogen