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주사전자현미경(SEM) - JEOL
JSM-6610 Scanning Electron Microscope


World's most widely-used family of SEMs!

The JSM-6610 is a high-performance scanning electron microscope for fast characterization and imaging of fine structures on both small and large samples. One of a family of four SEM models that are widely-used in all research fields and industrial applications, the JSM-6610 enables observation of specimens up to 200mm in diameter.

Throughout the evolution of this popular SEM family, JEOL has continued to enhance features and capabilities to offer the best possible imaging resolution, versatility, and operator interface.

With a high resolution of 3.0nm at 30kV, the JSM-6610 delivers amazing clarity of the finest structures. In addition to routine imaging at several hundreds of times greater resolution than the optical microscope, and with a focal depth several tens of times greater than the optical microscope, the SEM allows for detailed measurements, including 3D measurement from stereo images. Dual live image display of the secondary electron image and a backscattered composition image allow the user to contrast and compare specific details. An optional energy dispersive X-ray spectrometer (EDS) provides elemental analysis.

Measurement Functions


The JSM-6610 is used in varied applications with several options that increase its versatility. It can also be expanded to an analytical SEM by the addition of the optional EDS (Energy Dispersive Spectroscopy), WDS (Wavelength Dispersive X-Ray Spectrometry) or EBSD (electron backscatter diffraction).


Stage Navigation System

Other highlights include:

  • - Mechanically eucentric stage
  • - Fast, unattended data acquisition (with optional stage automation)
  • - Smart settings for common samples (create/store/recall)
  • - Streamlined design
  • - Compact footprint
  • - Customized toolbars for repetitive functions
  • - Enhanced secondary electron (SE) imaging
  • - Super conical lens
  • - Superior low kV imaging
  • - Multiple live image display (including picture in picture)
  • - Signal mixing
  • - Live, full screen image
  • - Video capability (.avi files)?

JSM-6610 Specifications
Resolution High Vacuum mode: 3.0 nm (30kV)
Accelerating Voltage 0.3 to 30 kV
Magnification x5 to 300,000 (printed as a 128mm x 96mm micrograph)
Filament Pre-centered W hairpin filament (with continuous auto bias)
Objective Lens

Super Conical lens

Objective Lens Apertures Click-stop type (3-step variable)
Fine position controllable in X/Y directions
Maximum Specimen Size 200mm dia. coverage
Specimen Stage 5 axis computer controlled Eucentric goniometer
X=125mm, Y=100mm, Z=5 to 80mm
T= -10 to 90°, R=360° (endless)