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주사전자현미경(SEM) - JEOL
JSM-6510 LV
JSM-6510LV Scanning Electron Microscope


World's most widely-used family of SEMs!

The JSM-6510LV low vacuum SEM is a high-performance, low cost, scanning electron microscope for fast characterization and imaging of fine structures. One of a family of four SEM models that are widely-used in all research fields and industrial applications, the JSM-6510LV enables observation of specimens up to 150mm in diameter.

The selectable Low Vacuum mode allows for observation of specimens that cannot be viewed at high vacuum due to excessive water content or because they have a non-conductive surface.

Throughout the evolution of this popular SEM family, JEOL has continued to enhance features and capabilities to offer the best possible imaging resolution, versatility, and operator interface.

With a high resolution of 3.0nm at 30kV, the JSM-6510LV delivers amazing clarity of the finest structures. In addition to routine imaging at several hundreds of times greater resolution than the optical microscope, and with a focal depth several tens of times greater than the optical microscope, the SEM allows for detailed measurements, including 3D measurement from stereo images. Dual live image display of the secondary electron image and a backscattered composition image allow the user to contrast and compare specific details. An optional energy dispersive X-ray spectrometer (EDS) provides elemental analysis.

Measurement Functions


Operation of the SEM is very simple through an intuitive GUI interface. Multiple users will find it easy to save customized workspaces accessible by login. A unique optional Stage Navigation System coupled with the optional stage automation makes it easy to locate the minute area of interest on the large sample without losing overall position. Standard automated features include auto focus/auto stigmator, auto gun (saturation, bias and alignment), and automatic contrast and brightness.


Stage Navigation System

Other highlights include:

  • - Mechanically eucentric stage
  • - Fast, unattended data acquisition (with optional stage automation)
  • - Smart settings for common samples (create/store/recall)
  • - Streamlined design
  • - Compact footprint
  • - Customized toolbars for repetitive functions
  • - Enhanced SE imaging
  • - Super conical lens
  • - Can be field upgraded for Low Vacuum
  • - Superior low kV imaging
  • - Multiple live image display (including picture in picture)
  • - Signal mixing
  • - Live, full screen image
  • - Video capability (.avi files)

JSM-6510LV Specifications
Resolution High Vacuum mode: 3.0 nm (30kV)
Low Vacuum mode: 4.0 nm (30kV)
Accelerating voltage 0.5 to 30 kV
Magnification x5 to 300,000 (printed as a 128mm x 96mm micrograph)
Filament Pre-centered W hairpin filament (with continuous auto bias)
Objective lens

Super conical lens

Objective lens apertures Three position, controllable in X/Y directions
Maximum specimen size:
GS Type stage 32mm full coverage
LGS Type stage 125mm dia.?full coverage (152.4mm dia. loadable)
Specimen stage**:
GS Type stage Eucentric goniometer
X=20mm, Y=10mm, Z=5mm-48mm
R=360° (endless)
Tilt -10/+90°
LGS Type stage Eucentric goniometer
X=80mm, Y=40mm, Z=5mm-48mm
R=360° (endless)
Tilt -10/+90°
(Computer controlled 2, 3 or 5 axis motor drive: option)
** Stage size (GS or LGS) must be specified at time of purchase.